Electromagnetic Angle Valve
Electromagnetic Angle Valve
Electromagnetic Angle Valve
Electromagnetic Angle Valve
Electromagnetic Angle Valve
Electromagnetic Angle Valve

SS304 SS316L Vacuum Electromagnetic Angle Valve Stainless Steel Electric Power Vacuum Angle Valve for Semiconductor

Model No.:VZL01

SKU:VZL01

Operation:
Electromagnetic
  • Electromagnetic
Body Materials:
SS304
  • SS304
  • SS316L
  • Aluminum
Seat Seal Material:
FKM
  • FKM
  • NBR
Bellow:
No Bellows
  • No Bellows
  • SS Corrugated Bellows
  • Weld Bellows
Size.:
KF16
  • KF16
  • KF25
  • KF40
  • KF50
Solenoid Voltage:
No Solenoid
  • No Solenoid
  • 220V AC
  • 110V AC
  • 24V DC
  • 12V DC
Position Indicator:
1 Sensor
  • 1 Sensor
  • 2 Sensors
  • No Position Indicator

Angle valves are a device that manually or pneumatic rotates the thread  to drive the valve shaft up and down, causing the valve seat to open or  close, thereby connecting or cutting off the airflow in the vacuum system. Valve body designed in 90° right angle(L type) and 45° right angle(Y  type). Connecting Flanges are available in KF, ISO, CF types and Tube ends  as well. They are rated for high-vacuum use and pressure rate from 1X10-6 Pa to  1.2x105 Pa, leak rate of 1.3x10-7 Pa L/s. Manually operated angle valves are an excellent solution when automation is not required, they are frequently used in roughing and high-vacuum forelines and make excellent chamber venting valves.

QiMing Angle valves are used in applications ranging from semiconductor manufacturing, plasma physics research, to nuclear accelerators.QiMing offers all series angle valves suited for vacuum applications such as high vacuum process processes, high vacuum applications in pumping  systems, semiconductor technology and research systems.

Technical Parameters

Valve Body Material SS304/SS316L
Seat Seal Material FKM, NBR in option
Application Scope With Bellow 1X10⁻⁶ Pa -1.2x10⁵ Pa
Without Bellow 1X10⁻⁶ Pa -1.2x10⁵ Pa
Leak Rate With Bellow 1.3x10⁻⁷ Pa L/s
Without Bellow 1.3x10⁻⁶ Pa L/s
Cycles Until Service With Bellow 150,000-200,000 Times
Without Bellow 1,000,000 Times
Bake-out Temerature Open:200°C, Close: 150°C
Installation Position Any Direction
Compressed Air 0.4-0.8Mpa
Opening/Close Speed ≤1S
Temperature Range FKM Seat Seal -30°C to 150°C (about)
NBR Seat Seal -25°C to 80°C (about))
Solenoid Voltage AC220V,50Hz,6W or on request
Avaible with Position Indicator Optional signal feedback

Electromagnetic Angle Valve(SS304 Aluminum Body)

   Model for 304/Alu      Size       A/mm       C/mm       D/mm      E/mm     F/mm     G/mm  
VZL01DC4311K16 KF16 167.5 35 48 62.5 44 39
VZL01DC4311K25 KF25 187 45 56 73.5 50 44
VZL01DC4311K40 KF40 221 55 78 94.5 73 63
VZL01DC4311K50 KF50 245 65 84 107.5 78 69

 

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