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한국어Model No.: FVS01
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VBG04 Series high vacuum butterfly valves are widely used on crystal growth furnaces, which are used for monocrystalline silicon wafer production. These valves can be zero leakage in very low pipe pressure, which is lower to 1.3*10⁻⁵ Pa. Forged stainless steel body and special sealing structure design, to ensure valve’s long life cycles.
| Valve Body Material | SS304/SS316L | |
| Seat Seal Material | FKM, NBR in option | |
| Vacuum Range | 105-6.7x10-5 Pa | |
| Leak Rate | 1.3x10-5 Pa. L/s | |
| Cycles Until Service | 80,000 Times | |
| Angle Opning | 0-90 Degree | |
| Temperature Range | FKM Seat Seal | -30°C to 150°C (about) |
| NBR Seat Seal | -25°C to 80°C (about) | |
| Operated | Manual, Pneumatic Actuator, Electric Actuator | |
| Compressed Air | 0.4-0.8Mpa | |
| Operating Time | Aluminium Actuator | ≤3S |
| Electric Actuator on-off type | Standard 30 S. 10S, 15S option | |
| Solenoid Voltage | Standard:AC220V,50Hz,6W Optional: AC110V, DC24V, DC12V |
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| Pneumatic Actuator | Standard: Double Acting Optional: 1. Normally Close 2. Normally Open |
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| Electric Actuator | Standard: On-off type Optional:Regulating control type |
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| Avaible with Position Indicator | Optional signal feedback | |
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Model for 304 | Size | D/mm | D0/mm | B/mm | H/mm | B1/mm | L/mm |
| VBG04H2431S63NN | ISO63 | 130 | 110 | 26 | 128.5 | 45 | 135 | |
| VBG04H2431S100NN | ISO100 | 165 | 145 | 30 | 152.5 | 45 | 135 | |
| VBG04H2431S160NN | ISO160 | 225 | 200 | 35 | 180.5 | 45 | 165 | |
| VBG04H2431S200NN | ISO200 | 285 | 260 | 40 | 213 | 45 | 185 |
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