VBK03 CF High Vacuum Butterfly Valve
VBK03 CF High Vacuum Butterfly Valve

VBK03 CF High Vacuum Butterfly Valve

Model:VBK03

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Used as ventilation, shut-off or high-vacuum valves, butterfly valves have a simple structure, and can be installed in the  vacuum exhaust line of a semiconductor tools. Butterfly Valves are characterised by their compact design, and high conductance. Made of stainless steel 304 or 316L, these valves  are also available manually operated or electro pneumatically.

Design and Feature

* Swivel valve plate with FKM seal

* Compact size and light weight,easy installing

* Minimal face-to-face dimension,Minimal installing space

* Flow by adjusting the degree of opening and can be set to an arbitrary degree of opening.

Technical Parameters

Valve Body Material SS304/SS316L
Seat Seal Material FKM, NBR in option
Vacuum Range 10⁵-6.7x10⁻⁵ Pa
Leak Rate 1.3x10⁻⁵ Pa. L/s
Cycles Until Service 100,000 Times
Angle Opning 0-90 Degree
Temperature Range FKM Seat Seal -30°C to 150°C (about)
NBR Seat Seal -25°C to 80°C (about)
Operated Manual, Pneumatic Actuator, Electric Actuator
Compressed Air 0.4-0.8Mpa
Opening/Close Speed Aluminium Actuator ≤3S
Electric Actuator on-off type Standard 30 S. 10S, 15S option
Solenoid Voltage AC220V, 50Hz, 6W or on request
Standard Electric Actuator On-off type
Avaible with Position Indicator Optional signal feedback

Ordering Information

CF Butterfly Valve

        Model for 304         Size     A/mm     B/mm     C/mm     D/mm     H/mm     RCD/mm     Bolt Hole     N.W./KG  
VBK03W2431K25NN CF35 25 70 48 32 61.5 58.7 Dia No 0.62

 

6.7

 

6

 

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