SS304 SS316L Vacuum Flange Butterfly Valves KF25-KF50 Stainless Steel Vacuum Performance NW25-NW50 Butterfly Valves for Semiconductor

Model No.:VBK21

SKU:VBK21

Operation:

Body Materials:

O-Ring Material:

Size.:

Used as ventilation, shut-off or high-vacuum valves, butterfly valves have a simple structure, and can be installed in the vacuum exhaust line of a semiconductor tools. Butterfly Valves are characterised by their compact design, and high conductance. Made of stainless steel 304 or 316L, these valves are also available manually operated or electro pneumatically.

Design and Feature

• Swivel valve plate with FKM seal

• Compact size and light weight,easy installing

• Minimal face-to-face dimension,Minimal installing space

• Flow by adjusting the degree of opening and can be set to an arbitrary degree of opening.

Technical Parameters

Valve Body Material		SS304/SS316L
Seat Seal Material		FKM, NBR in option
Vacuum Range		10⁵-6.7x10⁻⁵ Pa
Leak Rate		1.3x10⁻⁵ Pa. L/s
Cycles Until Service		100,000 Times
Angle Opning		0-90 Degree
Temperature Range	FKM Seat Seal	-30°C to 150°C (about)
	NBR Seat Seal	-25°C to 80°C (about)
Operated		Manual, Pneumatic Actuator, Electric Actuator
Compressed Air		0.4-0.8Mpa
Opening/Close Speed	Aluminium Actuator	≤3S
	Electric Actuator on-off type	Standard 30 S. 10S, 15S option
Solenoid Voltage		AC220V, 50Hz, 6W or on request
Standard Electric Actuator		On-off type
Avaible with Position Indicator		Optional signal feedback

KF Vacuum SS304 Butterfly Valve

Model for 304	Size	A/mm	DN/mm	D1/mm	D/mm	H/mm
VBK21H1431K16NN	KF16	66	15.8	17.2	30	39
VBK21H1431K25NN	KF25	66	22.1	26.2	40	39
VBK21H1431K40NN	KF40	70	34.8	41.2	55	43
VBK21H1431K50NN	KF50	76	47.5	52.2	75	51