Pneumatic L Type ISO Angle Valves with Bellow
Pneumatic L Type ISO Angle Valves with Bellow

Stainless Steel ISO Vacuum Pneumatic L Type ISO Angle Valves with Bellow NC SS304 SS36L Angle Valve for Semiconductor

Model No.:VZL01

SKU:VZL01

Operation:
Manual Plastic Handwheel
  • Manual Plastic Handwheel
  • Manual SS Handwheel
  • Pneumatic(Spring to Close)
  • Pneumatic(Spring to Open)
  • Pneumatic(Double Actuing)
  • Electromagnetic
Body Materials:
SS304
  • SS304
  • SS316L
  • Aluminum
Seat Seal Material:
FKM
  • FKM
  • NBR
Bellow:
No Bellows
  • No Bellows
  • SS Corrugated Bellows
  • Weld Bellows
Size.:
ISO63
  • ISO63
  • ISO80
  • ISO100
  • ISO125
  • ISO160
  • ISO200
  • ISO250
Solenoid Voltage:
No Solenoid
  • No Solenoid
  • 220V AC
  • 110V AC
  • 24V DC
  • 12V DC
Position Indicator:
1 Sensor
  • 1 Sensor
  • 2 Sensors
  • No Position Indicator

Manually operated angle valves are an excellent solution when automation is not required, they are frequently used in roughing and high-vacuum forelines and make excellent chamber venting valves. QiMing Angle valves are used in applications ranging from semiconductor manufacturing, plasma physics research, to nuclear accelerators.QiMing offers all series angle valves suited for vacuum applications such as high vacuum process processes, high vacuum applications in pumping systems, semiconductor technology and research systems.

Technical Parameters

Valve Body Material SS304/SS316L
Seat Seal Material FKM, NBR in option
Application Scope With Bellow 1X10⁻⁶ Pa -1.2x10⁵ Pa
Without Bellow 1X10⁻⁶ Pa -1.2x10⁵ Pa
Leak Rate With Bellow 1.3x10⁻⁷ Pa L/s
Without Bellow 1.3x10⁻⁶ Pa L/s
Cycles Until Service With Bellow 150,000-200,000 Times
Without Bellow 1,000,000 Times
Bake-out Temerature Open:200°C, Close: 150°C
Installation Position Any Direction
Compressed Air 0.4-0.8Mpa
Opening/Close Speed ≤1S
Temperature Range FKM Seat Seal -30°C to 150°C (about)
NBR Seat Seal -25°C to 80°C (about))
Solenoid Voltage AC220V,50Hz,6W or on request
Avaible with Position Indicator Optional signal feedback

Pneumatic L Type ISO Angle Valves with Bellow,NC

Model for 304 Size/规格 A/mm D/mm D1/mm H/mm N.W./kg
VZL02LC43B1S63 ISO63 88  95  70  275   
VZL02LC43B1S80 ISO80 98  110  83  325   
VZL02LC43B1S100 ISO100 108  130  102  355   
VZL02LC43B1S160 ISO160 138  180  153  485   
VZL02LC43B1S200 ISO200 200  240  213  620   
VZL02LC43B1S250 ISO250 208  290  261  665   
VZL02LC43B1S300 ISO300 250  370  318  830   
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